发明名称 |
Charged particle apparatus, scanning electron microscope, and sample inspection method |
摘要 |
An object of the invention is to be able to select easily and quickly inspection recipes which are appropriate to samples from any number of inspection recipes. A calculating device displays a plurality of inspection recipes on the GUI. An inspection recipe includes settings for controlling charged particle columns which irradiate charged particles on samples with a plurality of characteristics. Plural inspection recipes are arranged and displayed on a coordinate system which is specified by a plurality of axes having characteristic values (robustness variable of charge up, throughput of defect inspection, and accuracy of defect inspection) which have mutually trade-off relationships.
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申请公布号 |
US2007181807(A1) |
申请公布日期 |
2007.08.09 |
申请号 |
US20070700838 |
申请日期 |
2007.02.01 |
申请人 |
FUKUDA MUNEYUKI;SHOJO TOMOYASU;FUKADA ATSUKO;TAKAHASHI NORITSUGU |
发明人 |
FUKUDA MUNEYUKI;SHOJO TOMOYASU;FUKADA ATSUKO;TAKAHASHI NORITSUGU |
分类号 |
G21K7/00 |
主分类号 |
G21K7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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