SYSTEM FOR DISPATCHING SEMICONDUCTORS LOTS

摘要

A system (110) for dispatching a plurality of semiconductor lots (155, 160) among a plurality of tools is provided. The system includes a dispatch server manager (120) and a dispatch integrator and display device (110). The dispatch integrator and display device conveys a dispatch request (115) to the manager and receives a dispatch list (125) from the manager. The manager queries for a processing status of the plurality of semiconductor lots and displays a dispatch list in response to the processing status. The dispatch list includes an associated reason and/or code (180) related to the processing status.