| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor with restrained air damping, which can be driven electrostatically in atmospheric air, especially by a comb-teeth structure and can be driven by large amplitude. <P>SOLUTION: Primary oscillator bodies 17 and 18 are connected with primary beams 15 and 16 with respect to four rectangular flask sections 4, secondary oscillator body 37 is connected with secondary beams 146 and 147 to the primary oscillator bodies 17 and 18, and movable electrodes 173-176 for sensing are installed further in the secondary oscillator body 37 with beams 171 and 172. The secondary oscillator body 37 vibrates in the same direction (X-axis direction) at the vibration transmission from the primary oscillator bodies 17 and 18 as the primary oscillator bodies 17 and 18. Movable electrodes 173-176, for sensing detect the Coriolis force of the direction (Y-axis direction), which intersects perpendicularly in the oscillating direction, accompanying impression of the angular velocity by the vibration of the capacitance of the comb-teeth structure, while the secondary oscillator body 37 vibrates. <P>COPYRIGHT: (C)2007,JPO&INPIT |
