| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve carrying efficiency by optimizing the arrangement of buffers in a processing system unit by shortening a delay time during the carrying-in by carrying in the next article without a delay, when a load port of a processing system becomes empty by allocating the sufficient number of buffers in a carrying system such as an overhead traveling car system, a tracked carriage system and an unmanned carrier system traveling on the ground without a track. <P>SOLUTION: The required number of buffers is determined from a production quantity in a semiconductor processing factory. On respective bays, the buffers are distributed to the respective bays in response to the required number of buffers at each device determined from the carrying number via the bays, a lead time of the device in the bays and the number of load ports. The device in the bays is divided into a plurality of device groups, and the required number of buffers at each device group is determined from the lead time and the number of load ports of a processing system, and the buffers distributed to the bays are distributed to the device groups. Thus, the allocation of the buffers to the respective device groups can be optimized. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
