| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm pump in which both the discharge amount and the discharge pressure are increased, pump action is stably maintained even when a back pressure is applied, and self-sucking is sufficiently and efficiently performed. SOLUTION: A suction side preliminary chamber 11A and a discharge side preliminary chamber 11B are formed adjacent to a pump chamber 21. The pump chamber 21 is allowed to communicate with the suction side preliminary chamber 11A through a suction flow passage 17a, and the pump chamber 21 is allowed to communicate with the discharge side preliminary chamber 11B through a discharge flow passage 17b. A suction side check valve 18a and a discharge side check valve 18b are installed in these flow passages. A part of the wall part of the pump chamber 21 is formed by a pump actuator 50 composed of a diaphragm 51, a piezoelectric element 62, and a flexible disk 63. The disk 63 of a sub actuator 60 is driven in synchronism with the diaphragm 51 of the pump actuator 50. COPYRIGHT: (C)2007,JPO&INPIT
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