发明名称 |
Characterizing Curvatures and Stresses in Thin-Film Structures on Substrates having Spatially Non-Uniform Variations |
摘要 |
Techniques and devices are described to use spatially-varying curvature information of a layered structure to determine stresses at each location with non-local contributions from other locations of the structure. For example, a local contribution to stresses at a selected location on a layered structure formed on a substrate is determined from curvature changes at the selected location and a non-local contribution to the stresses at the selected location is also determined from curvature changes at all locations across the layered structure. Next, the local contribution and the non-local contribution are combined to determine the total stresses at the selected location.
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申请公布号 |
US2007180919(A1) |
申请公布日期 |
2007.08.09 |
申请号 |
US20060567662 |
申请日期 |
2006.12.06 |
申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY |
发明人 |
ROSAKIS ARES J.;HUANG YONGGANG |
分类号 |
G01L1/00 |
主分类号 |
G01L1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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