摘要 |
<p>A method, system and scan lens for use therein are provided for high-speed, laser-based, precise laser trimming at least one electrical element along a trim path. The method includes generating a pulsed laser output with a laser, the output having one or more laser pulses at a repetition rate. A fast rise/fall time, pulse-shaped q-switched laser or an ultra-fast laser may be used. Beam shaping optics may be used to generate a flat-top beam profile. Each laser pulse has a pulse energy, a laser wavelength within a range of laser wavelengths, and a pulse duration. The wavelength is short enough to produce desired short-wavelength benefits of small spot size, tight tolerance, high absorption and reduced or eliminated heat-affected zone (HAZ) along the trim path, but not so short so as to cause microcracking. In this way, resistance drift after the trimming process is reduced.</p> |
申请人 |
GSI GROUP CORPORATION;GU, BO;EHRMANN, JONATHAN, S.;LENTO, JOSEPH, V.;COUCH, BRUCE, L.;CHU, YUN, FEE;JOHNSON, SHEPARD, D. |
发明人 |
GU, BO;EHRMANN, JONATHAN, S.;LENTO, JOSEPH, V.;COUCH, BRUCE, L.;CHU, YUN, FEE;JOHNSON, SHEPARD, D. |