摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultrasonic driver for reducing a distribution of a vibration speed in a contact region between an oscillator and a movable element in the drive direction without reducing the contact region between the oscillator and the movable element, reducing a slippage between the oscillator and the movable element, and improving the efficiency and lifetime. <P>SOLUTION: An ultrasonic motor is provided with the oscillator 1 having an oscillation element 1-2 for generating an oscillation excited by piezoelectric elements 1-1a, 1-1b, and the movable element 2 contacting the oscillator 1 in a pressed state and driven by the oscillation from the oscillation element 1-2. The oscillation for displacing the oscillator 1 in the normal direction at the contact region between the oscillator 1 and the movable element 2 and the oscillation for displacing the oscillator 1 in the drive direction of the movable element 2 are excited in the oscillator 1. The oscillation excited in the oscillator 1 and displacing the oscillator 1 in the drive direction of the movable element 2 is an oscillation having a combination of at least a n-th order oscillation and a 3n-th order oscillation (n is a natural number). <P>COPYRIGHT: (C)2007,JPO&INPIT |