| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a salt that can be used as an acid generator for giving a chemically amplifiable resist composition showing high resolution. <P>SOLUTION: The salt is represented by the formula (I) (wherein X: an alkylene which may include a thioether bond or an ether bond except the atom connecting to the oxygen atom of -COO- group; Y: a 5C to 30C hydrocarbon group including at least one aromatic ring wherein the carbon atom of the Y may be substituted with an oxygen atom, and/or may form a carbonyl group; Y also may be a 1C to 6C alkyl, a 1C to 6C alkoxy group, a 1C to 5C perfluoroalkyl group, a 1C to 6C hydroxyalkyl group or may include one or more kinds of hydroxy group and cyano group; A<SP>+</SP>: organic counterion; n : 0 or 1; Q<SP>1</SP>, Q<SP>2</SP>are independent from each other and each a perfluoroalkyl group bearing 1-6 F or C atoms). <P>COPYRIGHT: (C)2007,JPO&INPIT |
