| 摘要 |
<P>PROBLEM TO BE SOLVED: To eliminate displacement and oscillation in structure and mirror cylinder polishing plate generated by stage scanning at the time of scanning exposure and improve throughput and exposure accuracy in the entire stepper. <P>SOLUTION: The stage equipment including a plurality of stages individually movable and an electromagnetic actuator that drives a plurality of the stages, wherein the electromagnetic actuator has a plurality of movers each connected to a plurality of the stages for one stator, and at least one pair of a plurality of the stages is connected with a mounting means. <P>COPYRIGHT: (C)2007,JPO&INPIT |
