| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a fine structure manufacturing method capable of forming a desired fine pattern on a surface or inside a workpiece with excellent reproducibility with high throughput. <P>SOLUTION: The fine structure manufacturing method includes a step of splitting incident laser beams into a plurality of diffraction beams by using a diffraction optical element 14, a step of condensing the plurality of split diffraction beams by a telecentric lens 15 to form the diffraction beams parallel to each other, a step of allowing each of the diffraction beams parallel to each other to be incident normal to the surface of an axicon assembly 16 with a plurality of axicons being arranged in an array so that the center of each diffraction beam is matched with the center of each axicon, and of forming a plurality of array-shaped Bessel beams, and a step of radiating the plurality of array-shaped Bessel beams on the workpiece. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
