| 摘要 |
PROBLEM TO BE SOLVED: To carry out redundancy repair by reliably detecting a half-short-circuit fault or a half-open-circuit fault, which is not detected in a conventional manner, concerning a process for inspecting a semiconductor integrated circuit device. SOLUTION: The semiconductor integrated circuit device is constituted with the use of a redundancy repair method so as to allow a circuit 104 to be inspected and a redundant circuit 105, both of which have the same function to be respectively and individually connected to power sources VS1(101) and VS2(102). Then an abnormal current detecting circuit 106 measures still power source current in the respective power sources VS1, VS2. When the measurement value of the still power source current in the circuit 104 to be inspected is abnormal, the fault is determined based on a fact that the still power source current is made to flow more compared with a normal standard value or the redundant circuit 105 when the half-open-circuit fault or the half-short-circuit fault exists in the circuit 104 to be inspected. A power source supply route is disconnected with respect to the circuit 104 to be inspected, which is determined to have the fault, with the use of a fuse circuit 107, so that replacement is performed in the redundant circuit 105. COPYRIGHT: (C)2007,JPO&INPIT
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