| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card fixing device capable of fixing easily a probe card onto a card holder. SOLUTION: This probe card fixing device capable of fixing easily the probe card 20 onto the card holder 30 is provided with a lever member 32 provided in the card holder 30 and engaged with the probe card 20, and a taper ring 40 for pressing the lever member 32 toward the probe card 20 to be fixed. COPYRIGHT: (C)2007,JPO&INPIT
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