| 摘要 |
PROBLEM TO BE SOLVED: To suppress the back-flow of a particle from a turbomolecular pump into a vacuum treatment chamber. SOLUTION: The turbomolecular pump comprises a rotor rotatably supported in a pump casing, and having multistage rotor blades in the axial direction; and a stator fixed between the rotor blades, and having multistage blades in the axial direction. In order to reduce the ratio that the particle injected from a suction port collides with the rotor blade 3, a blade part 3a of the a suction side first stage rotor blade 3 is formed so that the total area of the axial part of the blade part of the suction side first stage rotor blade is smaller than the total area of the axial part of a suction side second stage rotor blade 3b. COPYRIGHT: (C)2007,JPO&INPIT
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