发明名称 Roboterarm-Mechanismus
摘要 A robot arm mechanism includes a handling member for supporting and handling an object, a robot arm made up of at least four arm links, and a robot arm driving mechanism for driving the robot arm to assume its contracted and extended position. The robot arm comprises first and second arm links and a link retaining mechanism pivotably retaining the first and second arm links. The link retaining mechanism comprises first and second joint cross linkages similar in shape and each having two arms crossed to each other. The first joint cross linkage is integrally connected with one of the first and second arm links of the robot arm. The second joint cross linkage is integrally connected with the other one of the first and second arm links of the robot arm. This leads to the advantage of providing a robot arm mechanism exempt from driven gears, belts and pulleys forming part of a synchronous motion mechanism necessitated by conventional robot arm mechanisms to ensure that no dust is produced and fallen in a vacuum working chamber of highly pure air.
申请公布号 DE19954832(B4) 申请公布日期 2007.08.09
申请号 DE1999154832 申请日期 1999.11.15
申请人 TEIJIN SEIKI CO. LTD. 发明人 OKUNO, CHOHEI
分类号 B25J9/06;H01L21/677;B25J9/10;B25J18/04;B65G49/07;H01L21/68 主分类号 B25J9/06
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