ARRAY OF SPATIAL LIGHT MODULATORS AND METHOD OF PRODUCTION OF A SPATIAL LIGHT MODULATOR DEVICE
摘要
<p>For the production of a SLM device, one mounts a spatial light modulator (SLM) (2) on a substrate (3) of the same material as the main material of the SLM (2) to be juxtaposed with the substrate (3). Particularly, silicon based SLMs (2) are mounted on a silicon substrate (3). This leads to arrays of SLMs (2) that maintain a high accuracy with respect to position of the SLMs (2) and planarity. To further improve the planarity, it is preferred to mount the SLMs (2) on the substrate (3) by soldering, using the self-aligning effect of solder connections (20).</p>
申请公布号
EP1815295(A2)
申请公布日期
2007.08.08
申请号
EP20050805199
申请日期
2005.11.03
申请人
KONINKLIJKE PHILIPS ELECTRONICS N.V.
发明人
DE SAMBER, MARC, A.;DE JONG, MICHIEL;NELLISSEN, ANTONIUS, J., M.;VAN VEEN, NICOLAAS, J., A.