METHOD AND DEVICE FOR SCANNING LIGHT

摘要

A microelectromechanical system (MEMS) comprises a rotor assembly, having at least one micromirror surrounded by a gaseous environment, said at least one micromirror having a reflective surface connected to elongated wings and a permanent magnetic material mounted on said wings; and a stator assembly for applying a predetermined moment on said wings to establish rotary motion of said micromirror, said stator assembly having a magnetic circuit defined by a plurality of coils arranged such that at least two coils of said plurality of coils share a mutual core.