| 摘要 |
<p>A thermal flow rate sensor includes: a bridge circuit (100) having a heat-generating resistor (1) generating heat by receiving a supplied current, a heating element temperature detector (2) having a resistance value varying in accordance with a temperature of the heat-generating resistor (1) and a fluid temperature detector (3) having a resistance value varying in accordance with a temperature of a fluid; a comparison portion (81) supplying a digital output indicating a difference between voltages at intermediate points in the bridge circuit (100); a DA converter (63) converting an output from the comparison portion (81) to an analog signal and supplying the resultant signal to the heat-generating resistor (1) as the current; and an output operation portion (82) accumulating outputs from the comparison portion (81) for a prescribed period to output a result of accumulation as a flow rate for the prescribed period, of the fluid which is an object of measurement.
</p> |
