| 摘要 |
<p>A projection optical system is a system with good imaging performance based on well-balanced compensation for aberration associated with image height and aberration associated with numerical aperture, while ensuring a large effective image-side numerical aperture in the presence of a liquid in the optical path between the projection optical system and an image plane. The projection optical system forms an image of a first plane (R) on a second plane (W). An optical path between an optical member (L22:Lb) located nearest to the second plane out of optical members with a refractive power in the projection optical system, and the second plane is filled with a predetermined liquid. The projection optical system satisfies the condition of 0.02 < NA × WD/FA < 0.08, where NA is a numerical aperture on the second plane side of the projection optical system, WD a distance along the optical axis between an optical member located nearest to the first plane in the projection optical system, and the first plane, and FA a maximum of effective diameters of all optical surfaces in the projection optical system.</p> |
