发明名称 FUSE STRUCTURE OF SEMICONDUCTOR DEVICE
摘要 A fuse structure of a semiconductor device is provided to reduce the error rate of fuse lines by increasing a gap between upper fuse lines in comparison with a gap between lower fuse lines. A fuse structure of a semiconductor device includes a first fuse group(130). The first fuse group includes a plurality of lower fuse lines(100), a plurality of upper fuse lines(110), and a plurality of contacts(120). The lower fuse lines are formed in a constant interval on an upper surface of a semiconductor substrate and are extended in a predetermined direction. The upper fuse lines are formed on the lower fuse lines. A gap between the upper fuse lines is larger than a gap between the lower fuse lines. The upper fuse lines are extended in a direction opposite to the predetermined direction. The contacts are formed to connect the lower fuse lines with the upper fuse lines.
申请公布号 KR20070079809(A) 申请公布日期 2007.08.08
申请号 KR20060010793 申请日期 2006.02.03
申请人 HYNIX SEMICONDUCTOR INC. 发明人 PARK, JIN WON
分类号 H01L21/82 主分类号 H01L21/82
代理机构 代理人
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