| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electrostatic chuck for remarkably reducing a surface current of a dielectric between electrodes formed at the dielectric. SOLUTION: The electrostatic chuck comprises a base made of an insulator and a plurality of dielectrics. Voltage applying electrodes are formed at the respective dielectrics. The chuck further comprises an insulator having higher resistance than the surface resistance of the dielectric and interposed between the adjacent dielectrics.</p> |
