发明名称 |
Secondary process controller for supplementing a primary process controller |
摘要 |
A method and an apparatus for implementing a multi-variate process control system. A workpiece is processed using a primary process control function during a first time period. A secondary process control function is performed during at least a portion of the first time period for processing of the workpiece. The secondary process control function is capable of modifying at least one secondary control parameter.
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申请公布号 |
US7254453(B2) |
申请公布日期 |
2007.08.07 |
申请号 |
US20020301051 |
申请日期 |
2002.11.21 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
MARKLE RICHARD J.;SONDERMAN THOMAS J. |
分类号 |
G05B13/02;G05B19/418;G06F19/00 |
主分类号 |
G05B13/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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