Enhanced waveguide metrology gauge collimator

摘要

A free-space optically-coupled collimator for the efficient bidirectional transmission of an optical metrology beam emanating from a waveguide aperture of a waveguide optical transmission element, all contained in an isothermal nested enclosure, with the waveguide element mounted in a stress-free fashion. The focus of the collimator is set at the waveguide aperture of the waveguide optical transmission element, the optical axis of the collimator aligns with the optical metrology beam as it exits the waveguide aperture of the waveguide optical transmission element, and the numeric aperture of the collimator is equal to or larger than the numeric aperture of the optical metrology beam as it exits the waveguide aperture of the waveguide optical transmission element.