发明名称 |
Magnetic sensor having vertical hall device and method for manufacturing the same |
摘要 |
A vertical Hall device includes: a substrate; a semiconductor region having a first conductive type and disposed in the substrate; and a magnetic field detection portion disposed in the semiconductor region. The magnetic field detection portion is capable of detecting a magnetic field parallel to a surface of the substrate in a case where a current flows through the magnetic field detection portion in a vertical direction of the substrate. The semiconductor region is a diffusion layer including a conductive impurity doped and diffused therein. The semiconductor region is made of diffusion layer so that the device has high design degree of freedom.
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申请公布号 |
US7253490(B2) |
申请公布日期 |
2007.08.07 |
申请号 |
US20050082023 |
申请日期 |
2005.03.17 |
申请人 |
DENSO CORPORATION |
发明人 |
OOHIRA SATOSHI |
分类号 |
G01R33/07;H01L29/82;G01R33/02;H01L21/00;H01L21/8238;H01L27/092;H01L27/22;H01L43/00;H01L43/06;H01L43/14 |
主分类号 |
G01R33/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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