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发明名称
DEPOSITION METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100746679(B1)
申请公布日期
2007.08.06
申请号
KR20040044558
申请日期
2004.06.16
申请人
发明人
分类号
C23C16/42;H01L21/205;C23C16/40;H01L21/312;H01L21/316;H01L21/768
主分类号
C23C16/42
代理机构
代理人
主权项
地址
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