| 摘要 |
A wafer transferring apparatus is provided to prevent generation of process error by generating an interlock signal when a wafer is not detected at a normal position. A transfer blade(10) for holding at least one wafer is fixed to a robot arm. A wafer sensor unit(20) is coupled to the transfer blade to determine whether the wafer is positioned at a normal position on the upper surface of the blade. A controller(30) is electrically connected to the wafer sensor unit to determine the position of the wafer according to a signal output from the wafer sensor unit. The wafer sensor unit has at least one vacuum aperture formed on the upper surface of the blade, and a pressure sensor for checking pressure of the vacuum line.
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