| 摘要 |
<p>Provided are a method for preparing a fluoroalcohol compound, a fluorine-containing monomer obtained from the fluoroalcohol compound, a polymer compound containing the repeating unit obtained from the fluorine-containing monomer, a resist material containing the polymer compound, and a method for forming a pattern by using the resist material. The fluoroalcohol compound represented by a formula 4 is prepared by reacting a fluorine compound represented by a formula 1 with a reducing agent or an organometallic reagent represented by R^3M^1 and R^4M^1, wherein R^1 is H, or a C1-C20 linear, branched or cyclic monovalent hydrocarbon group whose -CH2- can be substituted with -O- or -C(=O)-; R^2 is H, or a C1-C6 linear, branched or cyclic monovalent hydrocarbon group; R^3 and R^4 are independently H, or a C1-C8 linear, branched or cyclic monovalent hydrocarbon group; and M1 can be substituted and is at least one selected from Li, Na, K, Mg, Zn, Al, B and Si.</p> |
