| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem of the contact of a shaft with a moving member that is posed by the bend of the shaft, without deteriorating the performance of non-contact drive by which a cylindrical linear motor is originally characterized. SOLUTION: Support structural portions 17A, 17B at both sides of the shaft 12 is each provided with a rotational direction regulation mechanism of two degrees of freedom that regulates bending moment in the vertical and horizontal directions. When the shaft 12 is deformed by its own weight in such a way as to sag at its center side, deflection deformation by the own weight of the shaft 12 is corrected by regulating the magnitude of the bending moment by making the bending moment act on the shaft 12 in the direction of lifting the center side of the shaft 12. When the bending of the shaft 12 in the horizontal direction is corrected, the bending moment in the horizontal direction is made to act on the shaft 12, so that the bending of the shaft 12 in the horizontal direction is corrected. COPYRIGHT: (C)2007,JPO&INPIT
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