| 摘要 |
PROBLEM TO BE SOLVED: To improve the measurement resolution of the shape measurement of three-dimensional shape, using a simple constitution. SOLUTION: Prescribed digitized projection patterns are successively projected on the measurement object, while shifting with a prescribed moving amount to the measurement object; a first kind image is obtained by oversampling the image of the measurement object projected with the prescribed digitized projection pattern by each time of the shift; and a second kind image is obtained by oversampling the image of measurement object projected with a plurality of digitized projection patterns different respectively, each time the digitized projection pattern of the plurality of digitized projection patterns different respectively are projected, while respectively projecting the plurality of respectively digitized projection pattern that are different. The three-dimensional shape of the measurement object is obtained, based on the first kind and the second kind images. COPYRIGHT: (C)2007,JPO&INPIT
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