SILICA GLASS FOR LASER MACHINING

摘要

PROBLEM TO BE SOLVED: To provide a silica glass or a silicate glass for laser machining volatilized by a laser in an ultraviolet region, and to provide a method for producing the same. SOLUTION: The silica glass for laser ablation comprises a fluorine compound in≥1 mol% by measurement according to a Rutherford backscattering method (RBS method). The production method for the same is described. COPYRIGHT: (C)2007,JPO&INPIT