Sensor module has control circuit arranged as integrated circuit on substrate, and sensor module has two sensor elements, and one of sensor elements is micro-electromechanical sensor made of silicon wafer

摘要

The module has a control circuit arranged as integrated circuit on a substrate, and the sensor module has two sensor elements. One of the sensor elements is a micro-electromechanical sensor made of a silicon wafer. The sensor module is designed as surface-mountable construction unit as plated through construction unit.