| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light source device for peripheral exposure which is advantageous for the environment, is compact, and offers high efficiency in mass production. <P>SOLUTION: The light source device for peripheral exposure is used to carry out peripheral exposure of wafer in a semiconductor manufacturing process. The light source device includes an LED unit which is disposed close to the peripheral surface of a wafer, and is composed of a plurality of UV-light-emitting diodes having an emission peak wavelength of 240 to 380 nm; and a control means which controls the emission power and turning on and off of respective UV-light-emitting diodes composing the LED unit. <P>COPYRIGHT: (C)2007,JPO&INPIT |
