| 摘要 |
PROBLEM TO BE SOLVED: To improve coating quality by improving film thickness controllability in the vicinity of the coating scanning finish part in a spinless coating method using a long sized nozzle. SOLUTION: In the final stage of coating scanning, a resist liquid swelled part RQ of a meniscus, which is stuck to or follows in the lower part side surface 78b of a resist nozzle till then, is separated from the resist nozzle 78 by instantly increasing the scanning speed to leave the swelled part preferably near the boundary Lx of a guarantee area. Right after the finish of the scanning, the excessive resist liquid on a coating scan finish end part is removed by carrying out suck-back of by the resist nozzle 78 on a substrate G and the influence of the suck back is canceled by the left resist liquid swelled part RQ to prevent the resist film thickness in the guarantee area Es from becoming equal to or below the set value or the allowable range. COPYRIGHT: (C)2007,JPO&INPIT
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