WAFER LEVEL PACKAGING TO LIDDED CHIPS

摘要

Methods are provided for making a plurality of lidded microelectronic elements (112). In an exemplary embodiment, a lid wafer (11) is assembled with a device wafer (10). Desirably, the lid wafer (11) is severed into a plurality of lid elements (40) to remove portions (46) of the lid wafer (11) overlying contacts (18) at a front face (26) of the device wafer (10) adjacent to dicing lanes (19) of the device wafer (10). Thereafter, desirably, the device wafer (10) is severed along the dicing lanes (19) to provide a plurality of lidded microelectronic elements (112).