| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve a miniaturization and an improvement of resolving power in a probe microscope, having a cantilever activated by the inter-atomic force with the surface of a sample. <P>SOLUTION: The probe microscope is miniaturized, by providing an observation illumination optical system 12 and a data detecting optical system 11 for fetching observation data out of the sample 10, with respect to a common object lens 14 and the improvement of the noise caused by the duplication of the wavelengths of the optical systems 11 and 12 is achieved by a wavelength-selecting element 13. <P>COPYRIGHT: (C)2007,JPO&INPIT |
