| 摘要 |
PROBLEM TO BE SOLVED: To provide a new and effective cleaning method by which a cleaned fluorine robber seal material for semiconductor production device can be acquired. SOLUTION: In this method for cleaning fluorine rubber seal material for semiconductor production device, the fluorine rubber seal material is extracted and cleaned by a Soxhlet extraction method, a high-temperature high-pressure extraction method, a microwave extraction method or a supercritical fluid extraction, or by combining these methods. COPYRIGHT: (C)2007,JPO&INPIT
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