METHOD AND DEVICE FOR HOLDING AND CENTERING OF SUBSTRATES

摘要

A centering pin arrangement for clamping a substrate with a hole with radius r_max comprises two bolts (2, 3) with an essentially semicircular cross section K, said bolts having radii r₂ and r₃ respectively. Said radii r₂ and r₃ are different and at least one of the bolts (2, 3) has a radius bigger or equal to the radius r_max of the hole. In another embodiment both radii r₂ and r₃ are bigger than the radius r_max of the hole.