ALUMINUM NITRIDE POWDER, ALUMINUM NITRIDE-BASED CERAMIC SINTERED BODY, MEMBER FOR SEMICONDUCTOR MANUFACTURING DEVICE, ALUMINUM NITRIDE LUMINESCENT MATERIAL, AND METHOD OF MANUFACTURING ALUMINUM NITRIDE POWDER

摘要

PROBLEM TO BE SOLVED: To improve a volume resistivity under a high-temperature atmosphere without adding an alkaline earth elements or boron.

SOLUTION: Aluminum nitride powder is prepared, for example, by placing 100 g of aluminum nitride (AlN) powder and 2.0 g of aluminum oxide (Al2O3) powder in a graphite crucible 1 and graphite crucibles 2a, 2b shown by figure 1 and thereafter, treating the entire crucible 3 shown by figure 1 with heat while keeping under a nitrogen atmosphere at a temperature of 2,200°C and a pressure of 1.5 kgf/cm2for 2 hours.

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