Method of generating discharge plasma

摘要

A pulse voltage is applied on a process gas to generate discharge plasma. The pulse voltage has a duty ratio controlled in a range of 0.001 percent or more and 8.0 percent or less. Preferably, the discharge plasma has an electron density of 1x10¹⁰ cm^-3 or larger and an electron temperature of 1.5 eV or lower at a supplied power of 1.0 W/cm² or more per a unit area of a discharge electrode.