| 摘要 |
Operating information about an operating part for performing an operation for processing in a substrate processing apparatus is detected by a detector, and is transmitted as an operating information signal from a unit controller to a data controller. An obtaining part in the data controller accumulates such operating information signals to obtain operating state transition information indicating a change with time in operating state of the operating part, and judges whether or not the operating state transition information is abnormal. When the operating state transition information is abnormal, a warning signal indicating that the operating state of the operating part is abnormal is transmitted from the data controller to a main controller. When the main controller receives the warning signal, a warning issuing part in the main controller issues a warning indicating that there is a possibility of the occurrence of a failure in the operating part.
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