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经营范围
发明名称
Mikrolithographischer Projektionsapparat
摘要
申请公布号
DE60128975(D1)
申请公布日期
2007.08.02
申请号
DE20016028975
申请日期
2001.01.18
申请人
ASML NETHERLANDS B.V.
发明人
MULKENS, JOHANNES
分类号
G02B19/00;G03F7/20;H01L21/027
主分类号
G02B19/00
代理机构
代理人
主权项
地址
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