| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a structure having smaller feature size than heretofore by adopting digital lithography. SOLUTION: The structure is formed on a substrate by a process comprising a 1st step of depositing a phase change material on the substrate, a 2nd step of forming a feature of a target material by depositing the target material at least partially in a gap and a 3rd step of removing the phase change material to leave the feature of the target material on the substrate. In the 1st step, a printing system provided with a print head is used and the phase change material is deposited in a 1st printing pattern and consequently the 1st printing pattern remains after change of the phase change material from a liquid phase to a solid phase and the 1st printing pattern defines the gap. COPYRIGHT: (C)2007,JPO&INPIT |
