| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for observing light scattering capable of measuring in a short time a distribution of a scatterer in the whole measuring object such as a sapphire ingot. SOLUTION: The device irradiates the measuring object 5 with a laser beam from a laser beam source 1, photographes the laser beam emitted from the measuring object by a CCD camera 6, and observes the scatterer existing in the measuring object. The device has characteristics wherein a 1/2-wavelength plate 2 for rotating the azimuth of linearly polarized light, the first galvano-mirror 3 and the second galvano-mirror 4 are arranged on an optical path between the laser beam source and the measuring object, and the laser beam transmitted through the 1/2-wavelength plate is reflected by the first galvano-mirror and the second galvano-mirror and subjected to two-dimensional scanning, and then the whole measuring object is irradiated therewith. COPYRIGHT: (C)2007,JPO&INPIT
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