| 摘要 |
PROBLEM TO BE SOLVED: To provide a system and method for measuring a circuit that detects parasitic capacitance, corrects its effect, and obtains a true circuit characteristic, in measuring the circuit where the measurement value is varied by the parasitic capacitance occurring in a measuring environment. SOLUTION: An objective circuit 1 whose characteristic is measured, a first ring oscillator 2 of a constitution that does not affected by the parasitic capacitance occurring in the measuring environment, and a second ring oscillator 3 of a constitution affected by the parasitic capacitance are designed on the same chip 7. Signals from the objective circuit 1, the first ring oscillator 2, and the second ring oscillator 3 are measured, respectively. The parasitic capacitance is detected based on the oscillation frequencies of the first and second ring oscillators 2 and 3. The characteristic fluctuation coefficient of the objective circuit 1 due to the detected parasitic capacitance is analyzed by circuit simulation. By correcting the actual measurement value of the objective circuit 1 by a value corresponding to the characteristic fluctuation coefficient, a true capability value of the objective circuit 1 is obtained. COPYRIGHT: (C)2007,JPO&INPIT
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