| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe head fixing structure capable of shortening the time for fixing the probe. SOLUTION: On the front end surface of a fixing holder 41, a V-shaped groove 61 is formed, a gauge head 42 is positioned at a part of peripheral surface of columnar gauge head 42 inserted state into the V-shaped groove 61, through holes 69 and 69 on the extended parts of 67 and 68 of the fixing holder 41 and the support rods 65 and 66 are inserted freely movably into each through hole 69. The support rods 65 and 66 are externally fitted with coil springs 111, and the coil springs 111 are provided between the extended parts 67 and 68 of the fixing holder 41, and stoppers 101 of the support rods 65 and 66 are freely shrinkable. The gauge head 42 supported by the support rods 65 and 66 are energized toward the V-shaped groove 61, and the periphery of the gauge head 42 is positioned and fixed in a state of being pressed against the V-shaped groove 61. COPYRIGHT: (C)2007,JPO&INPIT
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