PLASMA DISCHARGE REACTOR AND PLASMA DISCHARGE GENERATION METHOD

摘要

A plasma discharge reactor which is capable of generating a plasma discharge with substantially no limitation on the material or shape of an electrode and without having the electrode in contact with processing gas, in which a plasma discharge can be generated more stably and uniformly over a wide range with a lower power as compared with prior art, and a large volume of a gas can be industrially processed advantageously. Two dielectrics are arranged oppositely across a space section serving as a channel for a processing gas; electrodes are respectively provided on the outer surface of two dielectrics which are out of contact with the space section or in the two dielectrics; a groove is provided in the outer surface of at least one dielectric on the space section side; a gap portion formed by the groove and the space section constitute a plasma discharge reactor section; openings for introducing the processing gas into the space section and for discharging the processing gas are provided; and a power supply for applying a voltage to the electrode is provided.