Device for detecting particles for a mass spectrometer comprises trenches arranged between neighboring structures in the radiation direction

摘要

Device for detecting particles comprises trenches (3) arranged between neighboring structures (2) in the radiation direction. An independent claim is also included for a mass spectrometer with the above detection device arranged in the focal surface. Preferred Features: An aspect ratio is defined by a ratio of a height of the structures to the width of the trenches. The aspect ratio is at least 0.5. The structures are spaced at a uniform distance apart.