| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an actuator device wherein peeling and destruction due to displacement of a piezoelectric element are prevented and its durability and reliability are thereby enhanced, a manufacturing method therefor, and a liquid injection head. <P>SOLUTION: The actuator device includes a piezoelectric element 300 constructed of: a lower electrode 60 displaceably provided on a substrate 10; a piezoelectric body layer 70; and an upper electrode 80. The piezoelectric body layer 70 at an end of a piezoelectric body active part 320 that makes a substantial driving part for the piezoelectric element 300 is provided with a low active part 71 implanted with ions different from a substance that forms the piezoelectric body layer 70. <P>COPYRIGHT: (C)2007,JPO&INPIT |
