摘要 |
A vacuum apparatus includes a first isolation chamber, a second isolation chamber, a vacuum source configured to extract air from the first and second isolation chambers, and an isolation valve unit, wherein the isolation valve unit is configured to close a flow path between the vacuum source and the first isolation chamber before opening a flow path between the vacuum source and the second isolation chamber when the first isolation chamber is in a vacuum state and the second isolation chamber is at a pressure higher than that of the first isolation chamber.
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