| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibration piece and piezoelectric vibration device suitable for miniaturization. <P>SOLUTION: A crystal vibrator 1 comprises a crystal vibration piece 2, a base 3 holding the crystal vibration piece 2, a cap 4 for hermetically sealing the crystal vibration piece 2 held on the base 3, and a support member 5 reducing an external stress to the crystal vibration piece 2, and the crystal vibration piece 2 is held on the base 3 via the support member 5. Here, the base 3, the crystal vibration piece 2 and the support member 5 are ultrasonic-bonded by the FCB method by using a connection bump base bonding material 71 and a crystal vibration piece bonding material 72. The crystal vibration piece 2 is bonded with the support member 5 by the crystal vibration piece bonding material 72 on one region 26 of a substrate 21 thereof. Furthermore, a crystal vibration piece bonding region 51 for bonding with the crystal vibration piece 2 is set to the support member 5 on its one principal surface, and base bonding regions 521, 522 for bonding with the base 3 are set thereto on another principal surface thereof. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
